XRD Stress analysis of modern nanosized thin films at OC Oerlikon Balzers AG

August 16, 2011

Dr Matthias Sobiech
from OC Oerlikon Balzers AG

XRD stress analysis on modern high performance CrN thin films suitable for tribological applications were perfomed at OC Oerlikon Balzers on a state of the art diffractometer equipped with a FOX 2D Cu 12_INF optic.

This application note demonstrates the capability of a state of the art XRD set-up to perform advanced stress measurements on high performance thin films (stress depth profiling) when equipped with advanced X-ray optics providing a 2 dimensional parallel X-ray beam.

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